White light interferometer for absolute distance measurement with nanometer accuracy
The new IMS5400-DS white light interferometer opens up new perspectives in industrial distance measurement. The controller has an intelligent evaluation feature and enables absolute measurements with nanometer accuracy at a relatively large offset distance. Compared to other absolute measuring optical systems, the IMS5400-DS offers an unsurpassed combination of accuracy, measuring range and offset distance.
Characteristics
- Nanometer-precise, absolute distance measurements, suitable for step profiles
- Multi-peak distance measurement of transparent objects
- Compact and robust sensors with large offset distance
- Measuring rate up to 6 kHz for high speed measurements
- Robust controller with passive cooling
- Easy configuration via web interface
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Contact
Micro-Epsilon USA Headquarters
Efrain Arredondo
Micro-Epsilon America | East Regional Office
CT, DC, DE, MA, MD, ME, NH, NJ, NY, PA, RI, VT
Steve Sochowski
Micro-Epsilon America | Mid West Regional Office
IL: 600-619, IN, KY, MI, OH, PA: 150-167, WI: 530-539, 541-545, 549, WV
Jerry Carayanis
Micro-Epsilon America | Western Regional Office
AK, CA, HI, NV, OR, WA
Leon Renner
Micro-Epsilon America | Northern California Direct Office
CA: 932, 934, 936 - 961 (Northern Cal)
Friedrich "Fritz" Gebessler
Micro-Epsilon America | Central Regional Office
AZ, CO, IA, ID, IL: 620-629, KS, LA, MN, MO, MT, ND, NE, NM, OK, SD, TX, UT, WI: 540, 546-548, WY
Tim Prentice
Micro-Epsilon America | South East Regional Office
AL, AR, FL, GA, MS, NC, SC, TN, VA
Tim Fauser
Instrumentation Resources
IL
T&M Instruments
T&M Instruments
LA, OK, TX
Josh Gordon
Process Technology, Inc.
NM
Mike Hallenbeck
Process Technology, Inc.
ID, MT, UT, WY
Al Reithmeier, Kevin Corcoran
Analectro
DC, DE, MD, NJ PA: 168 - 196
Kurt Jacoby, Chris Jacoby
Dempsco
KY, IN, WV, OH: 430-433, 437-459 PA: 150-167
Philip Theaker, John Callaghan
Preferred Technical Resources
MI, OH: 434 - 436
John Saporito
MCT/RAM - Corporate Office
NY 120 - 123, 128 - 149
John Gustafson
MCT/RAM - Lower New York and New York City
NY 100 - 119, 124 - 127
Jon Korus
Instrumentation Resources
WI: 530 - 539, 541 - 545, 549
Tony Marquette
Instrumentation Resources
IA, KS, MN, MO, ND, NE, SD, WI: 540, 546 - 548
Ed Querfeld
Equipoise Technologies, LLC
OR, WA
Tim DiPeri
CASECO
AL, AR, MS, TN FL: 324 - 325
Dave Richardson, Bob McCartney
CAL Industrial Sales Co.
CA: 932, 934, 936 - 961 (Northern Cal) NV: 892 - 898
Mark Denison
Andruss Peskin Corp.
CT, RI
Jeff Wilkins
Andruss Peskin Corp.
ME, NH, VT
Jeff Wilkins, Mark Denison
Andruss Peskin Corp.
Absolute distance measurement with nanometer resolution
The IMS5400-DS is used for high-precision displacement and distance measurements. Unlike conventional interferometers, the IMS5400-DS also enables stable measurement of step profiles. Thanks to the absolute measurement, the scanning of steps is performed with high signal stability and precision. When measuring on moving objects, the differences in height of heels, steps and depressions can thus be reliably detected.
Multi-peak distance measurement
With multi-peak distance measurement on transparent objects, up to 14 distance values are evaluated simultaneously. For example, the distance between glass and a carrier plate can be determined. In addition, the controller can calculate the glass thickness based on the distance values.
Ideal for industrial environments
Robust sensors and a controller in a metal housing make the system ideally suitable for integration into production lines. The controller can be installed in the control cabinet via DIN rail mounting and provides very stable measurement results due to active temperature compensation and passive cooling. These compact sensors are extremely space-saving and can also be integrated in confined spaces. Highly flexible fiber optic cables are available in lengths up to 10 m and allow a spatial separation of sensor and controller. Commissioning and parameterization are conveniently performed via web interface and do not require any software installation.
Small light spot for the smallest of details and structures
The sensors generate a small light spot over the entire measuring range. The light spot diameter is only 10 µm and allows the detection of small details such as structures on semiconductors and miniaturized electronic components.
Measuring multiple surfaces
The interferometric measuring method enables measurements on numerous surfaces. This allows high-precision distance measurements on reflecting metals, plastics and glass.
Numerous models for demanding measurement tasks
| Model | Measuring range / Start of measuring range |
Linearity | Number of measurable layers |
Fields of application |
|---|---|---|---|---|
| IMS5400-DS19 | 2.1 mm / approx. 19 mm | ±50 nm | - | Industrial distance measurements e.g. in precision manufacturing |
| IMS5400-DS19/VAC | Precise positioning tasks and distance measurements in clean room environments and vacuum e.g. in display production for mask positioning | |||
| IMS5400MP-DS19 | Distance measurement: 2.1 mm / approx. 19 mm Thickness measurement: 0.01 ... 1.3 mm (for BK7, n=1.5) / approx. 19 mm |
±±50 nm for the first distance ±150 nm for each further distance |
Up to 13 layers | Industrial distance and thickness measurement e.g. in flat glass production |
| IMS5400MP-DS19/VAC | Precise distance and thickness measurement in clean room environments and vacuum e.g. in display production for distance and gap measurement |
Interface and signal processing units
Modern interfaces for integration into machines and systems
The controller offers integrated interfaces such as Ethernet, EtherCAT and RS422 as well as additional encoder connections, analog outputs, synchronization inputs and digital I/Os. When you use Micro-Epsilon's interface modules, PROFINET and EthernetIP are available. This allows the interferometer to be integrated into all control systems and production programs.
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Contact
Micro-Epsilon USA Headquarters
Efrain Arredondo
Micro-Epsilon America | East Regional Office
CT, DC, DE, MA, MD, ME, NH, NJ, NY, PA, RI, VT
Steve Sochowski
Micro-Epsilon America | Mid West Regional Office
IL: 600-619, IN, KY, MI, OH, PA: 150-167, WI: 530-539, 541-545, 549, WV
Jerry Carayanis
Micro-Epsilon America | Western Regional Office
AK, CA, HI, NV, OR, WA
Leon Renner
Micro-Epsilon America | Northern California Direct Office
CA: 932, 934, 936 - 961 (Northern Cal)
Friedrich "Fritz" Gebessler
Micro-Epsilon America | Central Regional Office
AZ, CO, IA, ID, IL: 620-629, KS, LA, MN, MO, MT, ND, NE, NM, OK, SD, TX, UT, WI: 540, 546-548, WY
Tim Prentice
Micro-Epsilon America | South East Regional Office
AL, AR, FL, GA, MS, NC, SC, TN, VA
Tim Fauser
Instrumentation Resources
IL
T&M Instruments
T&M Instruments
LA, OK, TX
Josh Gordon
Process Technology, Inc.
NM
Mike Hallenbeck
Process Technology, Inc.
ID, MT, UT, WY
Al Reithmeier, Kevin Corcoran
Analectro
DC, DE, MD, NJ PA: 168 - 196
Kurt Jacoby, Chris Jacoby
Dempsco
KY, IN, WV, OH: 430-433, 437-459 PA: 150-167
Philip Theaker, John Callaghan
Preferred Technical Resources
MI, OH: 434 - 436
John Saporito
MCT/RAM - Corporate Office
NY 120 - 123, 128 - 149
John Gustafson
MCT/RAM - Lower New York and New York City
NY 100 - 119, 124 - 127
Jon Korus
Instrumentation Resources
WI: 530 - 539, 541 - 545, 549
Tony Marquette
Instrumentation Resources
IA, KS, MN, MO, ND, NE, SD, WI: 540, 546 - 548
Ed Querfeld
Equipoise Technologies, LLC
OR, WA
Tim DiPeri
CASECO
AL, AR, MS, TN FL: 324 - 325
Dave Richardson, Bob McCartney
CAL Industrial Sales Co.
CA: 932, 934, 936 - 961 (Northern Cal) NV: 892 - 898
Mark Denison
Andruss Peskin Corp.
CT, RI
Jeff Wilkins
Andruss Peskin Corp.
ME, NH, VT
Jeff Wilkins, Mark Denison
Andruss Peskin Corp.